Shandong Dezhou 8-inch semiconductor-grade monocrystalline silicon wafer is successfully drawn, 12-inch project starts next year

On September 8, Texas was still shrouded in heat after the Bailu solar term
.
Shandong Youyan Semiconductor Materials Co.
, Ltd.
, located in the Dezhou Economic and Technological Development Zone, is very busy.
The company’s deputy general manager Liu Bin came to the single crystal preparation workshop.
A dozen tall Czochralski silicon growth furnaces were erected in the workshop.
Inside is an ultra-high temperature of 1420 degrees Celsius, and the raw materials polysilicon is melting little by little
.
Not long ago, it was here that good news came out: 8-inch monocrystalline silicon rods were successfully drawn at one time, and the first 8-inch monocrystalline silicon rods in Shandong Province "come out"
.
This is an important breakthrough in the integrated circuit industry in Shandong Province.
It not only marks the realization of mass production of this product in the new plant, but also the realization of "Made in Shandong" for semiconductor-grade monocrystalline silicon wafers of this size
.
It only took two years from signing the contract to the successful drawing.
On September 8th, in the single crystal preparation workshop of Shandong Youyan Semiconductor Materials Co.
, Ltd.
, the CZ workshop leader Duanmu Rongbo and several employees were watching the instrument attentively.
Various data on the
.
"The first semiconductor-grade 8-inch Czochralski single crystal silicon rod was successfully drawn from this furnace
.
" Duanmu Rongbo said, pointing to a growing furnace located in the innermost part of the workshop
.
Through the glass protective cover, the reporter saw that in the Czochralski silicon single crystal growth furnace, a newly drawn 8-inch single crystal silicon rod was growing.
The melted polysilicon in the quartz crucible was like the magma normally seen on TV.
, The sub-crystal is slowly rotating, and the contact point between the sub-crystal and the melted polysilicon is like a solar flare, emitting a bright golden yellow
.
"Put 200 kg of high-purity polysilicon into a quartz crucible, melt it at an ultra-high temperature of 1420 degrees Celsius, and slowly pull it into a single crystal silicon rod through the sub-crystal
.
It usually takes more than 70 hours to draw one .
" Liu Bin told reporters.
, The successfully drawn single crystal silicon rod is like a huge pencil, 1.
5 meters long, weighing more than 100 kilograms, in the shape of a cylinder, silver-gray and gleaming
.
Monocrystalline silicon rods are a key step in the production of monocrystalline silicon wafers.
Monocrystalline silicon rods are prepared by multiple processes such as slicing, chamfering, grinding, cleaning, placement, and polishing, and are used for the production of "chips".
Substrate
.
The reporter learned that in order to do its best to serve research projects, Dezhou has set up a special class to study and solve the problems encountered in the process of project construction
.
With the efforts of many parties, during the epidemic, the research company became the only project site in the country that did not stop construction during the epidemic
.
As the provincial key "number one" project, the research institute semiconductor project was signed on July 26, 2018 to the successful drawing of the first semiconductor-grade 8-inch Czochralski silicon rod in Shandong Province, which only took two years
.
The large-scale production of large-scale silicon materials for integrated circuits used by the research institute has grown step by step, which is a new beginning not only for Shandong Agri Semiconductor Materials Co.
, Ltd.
, but also for Dezhou and Shandong
.
The larger the diameter, the higher the difficulty.
Defects should be controlled at the nanometer level.
"Silicon is an important semiconductor material.
Successfully drawn monocrystalline silicon rods are made into silicon wafers, which can be used in satellites, computers, mobile phones, automobiles and other fields.
It is an integrated circuit industry.
An important basic material in the chain
.
The larger the diameter of the silicon wafer, the higher the requirements for materials and technology, and the greater the difficulty of manufacturing
.
" Liu Bin said
.
Recalling the "launch" of the first single crystal silicon rod, Liu Bin was very emotional.
He told reporters that the drawing of silicon single crystal is an extremely complicated process, and the defect size must be controlled at the nanometer level.
All have extremely high requirements
.
"During the drawing process, it is necessary to control the precise temperature and drawing speed.
The supply stability requirements of power conditions such as water, electricity and argon are very strict.
The most feared is the occurrence of jitter and the instability of energy supply
.
For example, the external power grid Stroboscopic can easily cause single crystal pulling failure, which may be only a second, but the impact is very large; during the Wenchuan earthquake, the silicon single crystal being drawn by the Beijing factory thousands of miles away was broken due to the shaking of the liquid level
.
" Liu Bin pointed to one of the growth furnaces and introduced to reporters that in order to avoid being affected by the shaking, the company invited experts in advance to survey the surrounding geology, and the base of the furnace and the surrounding land are separated; to ensure the stability of energy supply , Dezhou has built a 35 kV special substation for enterprises, and implements dual-circuit power supply
.
The 12-inch project will start next year to build a semiconductor material base.
It is reported that the second phase of the 3.
6 million 12-inch silicon wafer project is scheduled to start construction next year.
After it is completed and put into production, it will become the largest semiconductor material production base in northern China, which can effectively radiate Beijing, Tianjin, and Tianjin.
China's important electronic information industry bases such as Wuxi and Shijiazhuang
.
"Research projects have provided strong support for promoting the industrial transformation and upgrading of Texas and accelerating the conversion of new and old kinetic energy, so that Texas and the whole province have a place in the country's integrated circuits
.
In addition, a large number of employment opportunities will be increased.
In the
future, we will continue to provide a full range of services for research and development
.
” Zhao Xing, Minister of Science and Technology Innovation of Dezhou Economic and Technological Development Zone, said that research projects will surely become Dezhou’s "double recruits and double attract" promotion.
The successful model of quality development is of great and far-reaching significance for the development of a new generation of information technology industry in Dezhou and the whole province, the creation of strategic emerging industrial clusters, and the satisfaction of domestic silicon demand for integrated circuits
.
It is understood that chip manufacturing is mainly divided into five major links: silicon wafer preparation, chip manufacturing, chip testing and selection, assembly and packaging, and final testing.
Silicon wafer preparation is the first link, and the quality of silicon wafers is critical to subsequent chip manufacturing
.
"Now the most imported commodity in China is chips, and the import amount is more than 200 billion US dollars
.
" Liu Bin told reporters that China is currently the world's largest chip market.
For a long time, since there is no mature domestic production chain, silicon chips are mainly Supplied by original equipment suppliers such as the United States, Japan, South Korea, etc.
, domestic 8-inch semiconductor-grade monocrystalline silicon wafers are "made in Shandong", which can make up for the domestic production of semiconductor integrated circuit industries, automobiles, computers, consumer electronics, communications, industry, and medical care.
The demand for 8-inch semiconductor-grade monocrystalline silicon wafers in industries such as national defense and defense ensures the safety of silicon wafers supplied to the domestic market and the integrity and stability of the integrated circuit industry chain
.
At the same time, reduce China's dependence on imports of high-quality semiconductor silicon wafers, and meet the urgent requirements of China's integrated circuit industry for basic materials of silicon substrates
.