How to prevent particle pollution in clean room?

How to prevent the particle pollution in the dust-free room? How to prevent the particle pollution in the dust-free room? Qingdao purification company recommends three basic principles that should be abided by: one is not to bring in, two is not to store, three is not to manufacture [not to bring in] the methods of not bringing in the particle in the dust-free room are as follows: 1) before the operator enters the dust-free room, the machine and parts shall be cleaned; 2) the operator entering the dust-free room shall wear the dust-free clothes, shoes, hats, gloves, masks, etc with special conductive fiber materials, which are dust-free and static free in the dressing room 3) when passing through the air shower room, use high-speed clean air to remove the particles attached to the clothing surface before entering the dust-free room 4) before the machine and materials are brought into the dust-free room, they should be wiped with ultra pure water in the sealed state as far as possible, and they can only enter the dust-free room after being blown by the air shower room 5) the airtight safety helmet shall be worn in the dust-free room, and the fan with small exhaust filter shall be worn at the waist [no storage] if the "no carry in" technology can be fully implemented, the cleanliness of the clean room can be maintained However, in reality, it is impossible to have a complete cleanliness in the vast clean room due to the frequent access of people and objects and the brake of manufacturing machines Therefore, it is very important to apply "no reserve" technology to filter quickly to remove the particles that have occurred Usually, the particles will stay on the surface of the surrounding object according to the gravity and electrostatic adsorption force Sudden vibration and unstable air flow will make these accumulated particles rise again in the air, increasing the risk of major particle pollution [do not manufacture] while controlling the dust emission of Zui's large pollution source -- people's particles in the dust-free room, we should also control the dust emission of manufacturing machine, the second largest pollution source Because the friction and contact peeling caused by moving objects will cause dust, and particles will also occur when moving objects Therefore, in order to control the dust emission to a small extent, Qingdao purification company suggests the following countermeasures: 1) reduce the action form of contact stripping dust emission; 2) use the material with small abrasion dust emission; 3) use the lubricating oil with small dust emission; 4) apply the non-contact working principle of air pressure floating on the machine In the high-grade dust-free room of Zui, from the ceiling to the ground, the air that completely removes the particles must flow vertically downward at the speed of 0.3-0.4m/s This is the value calculated by the complete exchange of indoor air and fully filtered air in about 10 seconds At the same time, the flow direction of air must be controlled In particular, it is necessary to ensure that the flow path of the air flow is unobstructed, because if there are obstacles in the flow path, it is easy to generate air vortex and form the air retention area, so that the nearby particles can not be quickly removed and drift in the dust-free room for a long time, and some of them will adhere to the surface of the surrounding machinery and equipment, resulting in pollution Controlling the air flow can prevent the accumulation of particles, but it cannot prevent the accumulation of particles on the charged surface The concentration of floating particles in the dust-free room can easily reach zero level by using the high-performance filter In the actual production site, due to the dust generation of operators, machines, peripheral machinery and parts and materials contacted during the transportation of the substrate, a little particles are raised around the products, resulting in particle pollution on the cleaning surface of the components.