my country's first complete production line for quartz glass substrates was completed

On the 3rd, it was learned from the China Building Materials Research Institute (hereinafter referred to as the General Institute of Building Materials) that based on the green manufacturing technology of quartz glass substrates for photolithography (hereinafter referred to as the quartz glass substrates), the Quartz Institute of the General Institute of Building Materials established the first domestic supplier in Quzhou.
A complete production line from substrate raw material manufacturing to product processing.
This production line can produce 20,000 4-6 inch quartz glass substrates per year, breaking the long-term dependence on imports of quartz glass substrate raw materials and products
.
The establishment of this production line is one of the results of the "Twelfth Five-Year" National Science and Technology Support Program "Development and Demonstration of Key Technologies for Special Materials such as High-Performance Quartz Glass and Glass Ceramics" undertaken by the General Institute of Building Materials
.
The quartz glass substrate is the core device in the integrated circuit chip manufacturing process, and the market demand is huge
.
As the raw material of quartz glass substrate, synthetic quartz glass has many advantages such as good thermal stability, high optical uniformity, and radiation resistance
.
However, due to the purity, uniformity, processing accuracy, and hardness of raw materials, China's quartz glass substrates have long relied on imports
.
As the only scientific research institute specializing in the research of quartz glass in China, the scientific research personnel of the Quartz Institute of the General Institute of Building Materials have worked tirelessly to form a unique process route in line with the current situation and development trend of the industry in China, which not only solves the purity of the raw materials of the quartz glass substrate, The problem of uniformity, while realizing green manufacturing of raw materials; the introduction of multi-knife cutting, safe and fast grinding and polishing technology, creatively developed technologies such as fusion drawn blanks, CNC chamfering, etc.
, to solve the problem of the processing accuracy of the quartz glass substrate
.
From substrate raw material manufacturing to product processing, the institute has formed more than 20 patents, more than 10 industry standards, national military standards and national standards.
It has developed a variety of specifications of quartz glass substrates, wafers, lenses and other series of products, not only gradually It replaces imports and exports to Europe, Japan and other countries
.